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大气机械手SRBJ1A-AS3491

关键字导读: TRACK ETCH PVD PECVD MOCVD MEMS CMP COATING CLEAN DETECT

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参数

parameter


结构形式Mechanical Structure柱坐标型/SCARA型 Cylindrical Coordinate/SCARA
负载Payload名称name晶圆wafer
直径diameterΦ200mm/Φ300mm
重量weight≤0.5kg
自由度数DOF3
最大回转直径Maximum Swing diameter520mm

yundongfanwei

Moving  Range
升降轴 (Z轴)Up/Down( Z)-Axis330mm
回转轴 (T轴) Rotational(T)-Axis330°
伸展轴 (R轴) Extension(Z)-AxisR736mm

zuidasudu

Maximum  Moving Speed
升降轴 (Z轴)Up/Down( Z)-Axis330mm/s
回转轴 (T轴) Rotational(T)-Axis360°
伸展轴 (R轴) Extension(Z)-Axis900mm/s

zhongfudingweijingdu

Repeatability
升降轴 (Z轴)Up/Down( Z)-Axis±0.1 mm(3σ)
回转轴 (T轴) Rotational(T)-Axis±0.01°(3σ)
伸展轴 (R轴) Extension(Z)-Axis±0.1 mm(3σ)



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