捕鱼app

PINUS1-B

关键字导读: PECVD PVD ETCH MEMS

miaoshu:zhiqudianjijiegou,quanxindeiomokuai,juyouxianjindefangpengzhuangbaohugongnengjishuruxinhaozhiyingjianzhongduangongneng,yongyousemirenzheng。manzugexinghuashejizhichiyonghudingzhi,shoubeizhangdukexuan,keweikehutigongjiekoujimoduandingzhifuwu。

简介

introduction

捕鱼appzhiqudianjijiegoujuyougenggaodezhenkongtexing,neibujiegoumeiyouchilun,pidaidengbujian,xitongyunxingdepingwenxinggenghao,kekaoxinggenggao。quanxindeiomokuai,juyougengduodeshuchushuruyinjiao,yonghukeyigenjuxuqiupeizhichenghusuo,chuanganqijiancedenggongneng。shuruxinhaozhiyingjianzhongduangongneng,fangbiankehupeizhiawcdengweizhisuocungongnengyingyong。daiyouanquanqupeizhigongnenghelingmindepengzhuangbaohugongneng,jianshaoyonghuwucaozuodaozhidegezhongsunshi。daiyoudapingmujiqirenshijiaoqi,fangbiandiaoshirenyuanshiyong,bingzhichirechabagongneng。keyigenjukehuyingyongdeteshuyaoqiu,dingzhishoubeichicun,zzhouxingcheng,naigaowennaifushitexingdeng。


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参数

parameter


本体重量Body Weight50KG
适用晶圆尺寸Wafer Size300mm/200mm/150mm/125mm/100mm
负载Payload1KG
电源输入Power SupplyAC电压:100-240V    AC频率:50HZ/60HZ
节拍Bear4s-8.1s(Pick,Rotate180°,Place,根据手指材料,传输位置不同相关)
动态偏差纠正精度(AWC)±0.1mm
重复定位精度RepeatabilityZ: ±0.05mm(3σ)
T: ±0.003°(3σ)
R: ±0.05mm(3σ)
漏率Leak rate<  1 x 10E-9 std. cc/sec He
真空度Base Pressure5X10-9Torr

捕鱼appshiyongwendu applicable  temperature

法兰:<120℃;本体:<50℃;手臂:<120℃

jiejingduclean class

ISO  CLASS1

mcbf

>1100million cycles

fuheyundong compound  motion

支持Support
PC远程操作软件支持Support
通信接口Communications

捕鱼appethernet/chuankouserial interface

IO互锁IO interlock

zhichisupport

安全区Safe area

zhichisupport

pengzhuangbaohucollision  protection

zhichisupport



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